An optical method for mask alignment in double-sided lithography has been developed by a team at the University of Hagen in Germany (Appl. Opt. 40 5052). The technique, which is based on the ...
[Left] Semiconductor layers are stacked using concentric metalenses as alignment marks. [Right] Light shines through these marks to project a hologram. The alignment or misalignment of the lenses ...
Forward-looking: Researchers at the University of Massachusetts Amherst have developed a laser-based technique to align 3D semiconductor chips, potentially overcoming a longstanding challenge in chip ...
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